Quava

Kaijo Quava is a megasonic generator for cleaning systems designed for powerful and precise cleaning of semiconductors, flat-panel displays, hard disks, and solar components. It meets high requirements for cleaning processes in manufacturing by effectively removing sub-micron particles. Constant output is controllable with the digital display with a detector function for upper and lower limits. An internal CPU enables communication with a host computer to control output power and provide feedback of the operational status. Advanced system technology provides efficient oscillation with uniform cleaning.

If you have any questions about using Quava Megasonic for your application, please contact us by e-mail.

Benefits

    • High quality and industrial-grade reliability at competitive pricing
    • Cost-effective and easy to use
    • Improved cleaning of manufactured products
    • Output power can be adjusted between 1 W and 1200 W
    • No field calibration required, allows simple replacement
    • Selectable cleaning frequency to fit your requirements
    • Can be used as direct replacement for older Kaijo generators

      Features

        • Four different oscillation modes available
        • Powerful 1200 watts maximum at 430 kHz, 750 kHz or 950 kHz
        • Automatic frequency tracking
        • Removable matching box
        • Programmable soft start and soft stop
        • One generator may be used for 10 frequencies from 26 kHz to 950 kHz
        • Compatible with all Kaijo transducer arrays

          Quava megasonic oscillation modes

          Quava Specifications

          Model 70110
          Max. output 1200 W
          Frequency 430 kHz / 750 kHz / 950 kHz
          Oscillation modes PLL / Fixed / A Mode / B Mode
          Power supply AC 200–240 V, 50/60 Hz
          Consumption 10 A
          Dimensions (W × D × H) 430 mm × 418 mm × 148 mm
          Weight 17 kg

          Transducer plates for wafer cleaning

          The transducer plate provides a highly uniform cleaning density (up to 5.4 W/cm²). It is fixed directly to the cleaning tank by bolts.

          Transducer Plate Specifications

          Model 7857S 8857S 98SL
          Wafer size 6"
          (152 mm)
          8"
          (203 mm)
          12"
          (304 mm)
          Max. Input 300 W
          × 4
          300 W
          × 6
          300 W
          × 16
          Frequency 950 kHz 950 kHz 750 kHz
          Effective area (mm) 136 × 163 165 × 215 275 × 319
          Plate material SU316L
          Transducer element PZT
          Heat-resistant temperature 70 °C
          Outer dimensions
          (W × D × H, mm)
          185 × 215 × 55 255 × 305 × 55 410 × 340 × 65
          Installation Bolt fixation